Hatfield PA., July 6, 2007 - SIMCO, the largest provider and recognized leader of ionization solutions for electrostatic charge control, introduces patented “Peak Reduction” technology in our high performance sorpION3 air ionization bar. The scorpION3 is designed to control electrostatic charge in front-end semiconductor tools, mini-environments, flow–hoods, and other cleanroom processes.
ScorpION3 is a high performance ionization bar designed to exceed ISO Class 1 particle requirements while meeting the most demanding electrostatic charge specifications. The product meets the unique needs of Equipment Front End Modules (EFEM) for 200 and 300 mm wafer process tools while seamlessly integrating ionizer functionality through the tool’s user interface.
ScorpION3 can be set to operate with Peak Reduction technology (US Patent #6,826,030, international patents pending), allowing a user to select a percentage of time during which both power supplies are turned on during bi-polar pulse cycles. Peak Reduction maintains longer ion production times during pulse cycles to deliver faster discharge times at reduced levels of offset voltage. The result is a more ion-saturated environment with improved performance and the ability to improve specification margin.
A full-featured PC software system connected via RS-485 or Ethernet is available for the ScorpION3. The system was designed to allow multiple bar systems to be connected and controlled from a single personal computer. This connection allows ion bar performance and settings to be monitored, configured and diagnosed. ScorpION3 can also be controlled via a hand-held MMI (man machine interface) in 2-way IR or wired operating mode. The MMI has a multi-line display and membrane switch pad.
SorpION3 is available with CVD Silicon Carbide emitters. The system operates on 24VDC input. Provides RS-485 communications. Communications and power are distributed via 6-conductor RJ-11 connector and may be daisy chain wired in series. Dimensions are 75H x 48W mm and are available in a number of select lengths including 45.7; 61.0; 91.4; 111.8 and 162.6cm.
ScorpION3 is manufactured under multiple US and International patents and patents pending.
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