Semiconductor Manufacturing

Static charges are found in many phases of semiconductor manufacturing -- wafer production, fabrication, packaging, and testing. Controlling static charges is vital because ESD has a significant impact on device yields. Defects caused by electrostatically-attracted foreign matter and ESD events can contribute to manufacturing yield losses. Lock-up of process equipment can result in wafer damage and lost production.

Solutions

Aerostat Guardian CR2000 The Guardian CR2000 features a patented circuit that results in balanced delivery of positive and negative ions, which ensures that the unit will maintain an ion balance of 0±5 V. Balance stability is further enhanced by use of SIMCO's unique "ion shields" at the fan outputs to reduce parasitic ion loss.

fusION The fusION is a bi-polar air ionizer capable of controlling electrostatic charge in the local area. Applications for fusION are those found inside process equipment and mini-environments in the semiconductor, flat panel display, pharmaceutical, and medical device industries. It is especially well suited for applications with space constraints and low clearance.

Gemini Profile Emitter Modules SIMCO's patented Gemini Profile Room Ionization System features individually addressable Profile emitter modules.

IONforce Ion Bar The Simco’ IONforce ion bar provides rapid neutralization of static charges and prevents electrostatic discharge (ESD) in applications such as cleanrooms and workstations. Powered with a Simco’ PFC or VisION Controller unit, the IONforce bar produces positive and negative ions that rapidly neutralize any potentially destructive charges in the work area.

minION2 Ionizing Air Blower SIMCO’s minION2 ionizing air blower is designed to control electrostatic charges in semiconductor and electronics manufacturing equipment and for benchtop applications requiring high performance in a small package. Using steady-state DC corona ion technology, the minION2 features self-monitoring to ensure controlled, consistent ion output.

scorpION3 Ionizing Bar The new next generation ScorpION3 product has incorporated in its redesign expanded functionality to respond to the stringent requirements and continued demand for ESD protection and faster discharge times in Equipment Front End Modules(EFEM). ScorpION3 incorporates Simco's unique “Peak Reduction Technology” (US Patent #6,826,030, International Patents Pending). The result is a more ion-saturated environment with improved performance.

Semiconductor Manufacturing

Aerostat Guardian CR2000

fusION

Gemini Profile Emitter Modules

IONforce Ion Bar

minION2 Ionizing Air Blower

scorpION3 Ionizing Bar